Abstract:
This thesis contains the work on preparation of PZT thin film and modeling of
sensor through it .PZT comes under the category smart materials, it shows the
properties of ferroelectricity, piezoelectricity and pyroelectricity and it is widely
used in sensors and actuators . In this work we first made PZT in bulk form and
perform its various structural and electrical characterization. After making pellet
in highly pure form, thin film are prepared using PLD from this target. Various
properties of PZT thin film are then observed , discussed and compared with the
polycrystalline bulk material, silicon is used as substrate for making thin film ,so
the properties observed can be directly utilized in integrated circuit technology.
Finally based on observed data some useful electronics circuits are modeled.
