A REVIEW OF VLSI TECHNOLOGY

Abstract

Various stages of development in the Very Large Scale Integrated Circuit (VLSI) Technology have been given. Imple-mentation of very large scale integrated circuits has been given right from the initial stage. Lithographic techniques for pattern generation and the use of standard resists and presently employed exposure systems have been discussed. The use of Ga As in VLSI and various technologies towards VLSI like bipolar, N- IROS, C4,O .., SOS etc. are also discussed. Several problems like those of electromigration,in interconnection and packaging techniques are given. The use of computer. Aided Design in VLSI and application of VLSI are also discussed. In the end problems associated with VLSI technology are given and a few suggestions about the area in 'VLSI which need further investigations are pointed out.