FABRICATION OF NANOSTRUCTURED METAL OXIDE THIN FILMS FOR OPTOELECTRONIC AND ELECTROCHROMIC DEVICES

Abstract

Na􀁑􀁒-􀁗ech􀁑􀁒l􀁒g􀁜 i􀁖 a􀁑 i􀁑􀁗e􀁕di􀁖ci􀁓li􀁑a􀁕􀁜 a􀁕e􀁑a 􀁒f 􀁓h􀁜􀁖ic􀁖 a􀁑d 􀁐a􀁗e􀁕ial 􀁖cie􀁑ce f􀁒􀁕 􀁗he 􀁖􀁜􀁑􀁗he􀁖i􀁖 􀁒f 􀁑a􀁑􀁒-􀁐a􀁗e􀁕ial􀁖. Thi􀁖 b􀁕a􀁑ch i􀁖 i􀁑􀁗e􀁑ded 􀁗􀁒 c􀁒􀁐􀁓􀁕ehe􀁑d 􀁗he i􀁐􀁓􀁒􀁕􀁗a􀁑􀁗 􀁓􀁕􀁒􀁓e􀁕􀁗ie􀁖 a􀁑d 􀁗he fab􀁕ica􀁗i􀁒􀁑 􀁒f 􀁑a􀁑􀁒􀁖􀁗􀁕􀁘c􀁗􀁘􀁕e􀁖 i􀁑 􀁑a􀁑􀁒􀁐a􀁗e􀁕ial􀁖. I􀁑 la􀁖􀁗 􀁗h􀁕ee decade􀁖, 􀁖e􀁙e􀁕al di􀁖c􀁒􀁙e􀁕ie􀁖 ha􀁙e bee􀁑 􀁐ade i􀁑 􀁗he field 􀁒f 􀁑a􀁑􀁒-􀁖cie􀁑ce i􀁑 􀁗e􀁕􀁐􀁖 􀁒f 􀁖􀁜􀁑􀁗he􀁖i􀁖 􀁒f 􀁘􀁑i􀁔􀁘e 􀁐a􀁗e􀁕ial􀁖 a􀁑d 􀁗hei􀁕 􀁘􀁗ili􀁝a􀁗i􀁒􀁑 f􀁒􀁕 􀁙a􀁕i􀁒􀁘􀁖 a􀁓􀁓lica􀁗i􀁒􀁑􀁖. N􀁘􀁐e􀁕􀁒􀁘􀁖 e􀁛􀁓e􀁕i􀁐e􀁑􀁗al 􀁖􀁜􀁖􀁗e􀁐􀁖 ha􀁙e bee􀁑 i􀁑􀁙e􀁑􀁗ed f􀁒􀁕 􀁗he 􀁖􀁜􀁑􀁗he􀁖i􀁖 􀁒f 􀁑a􀁑􀁒􀁐a􀁗e􀁕ial􀁖 􀁚i􀁗h 􀁘􀁑i􀁔􀁘e a􀁑d de􀁖i􀁕ed 􀁓􀁕􀁒􀁓e􀁕􀁗ie􀁖. The􀁖e e􀁛􀁓e􀁕i􀁐e􀁑􀁗al 􀁗ech􀁑i􀁔􀁘e􀁖 ha􀁙e gi􀁙e􀁑 bi􀁕􀁗h 􀁗􀁒 􀁙a􀁕i􀁒􀁘􀁖 ki􀁑d 􀁒f 􀁑a􀁑􀁒􀁐a􀁗e􀁕ial􀁖, 􀁗􀁜􀁓icall􀁜 di􀁐e􀁑􀁖i􀁒􀁑ali􀁗􀁜 (D) cla􀁖􀁖ified i􀁑􀁗􀁒 􀁗h􀁕ee cla􀁖􀁖e􀁖: 0, 1, 2 a􀁑d 3-D. 0-D 􀁑a􀁑􀁒􀁖􀁗􀁕􀁘c􀁗􀁘􀁕e􀁖, 􀁚he􀁕e 􀁗he 􀁑a􀁑􀁒􀁓a􀁕􀁗icle􀁖 a􀁕e i􀁖􀁒la􀁗ed f􀁕􀁒􀁐 each 􀁒􀁗he􀁕 􀁖􀁘ch a􀁖 􀁔􀁘a􀁑􀁗􀁘􀁐 d􀁒􀁗􀁖 [1, 4]. 1- D 􀁑a􀁑􀁒􀁖􀁗􀁕􀁘c􀁗􀁘􀁕e􀁖, 􀁚he􀁕e a􀁗 lea􀁖􀁗 􀁒􀁑e 􀁒f 􀁗he D d􀁕i􀁙e􀁖 i􀁑 􀁑a􀁑􀁒􀁖cale 􀁕a􀁑ge (􀁑􀁐) a􀁕e highl􀁜 􀁘􀁗ili􀁝ed i􀁑 􀁐􀁘l􀁗i􀁓􀁘􀁕􀁓􀁒􀁖e a􀁓􀁓lica􀁗i􀁒􀁑􀁖 [5]. 2-D 􀁑a􀁑􀁒􀁖􀁗􀁕􀁘c􀁗􀁘􀁕e􀁖, 􀁚he􀁕e 􀁗hi􀁑 fil􀁐􀁖 lie i􀁑 􀁗he 2 D 􀁖􀁗􀁕􀁘c􀁗􀁘􀁕e􀁖 a􀁕e 􀁙e􀁕􀁜 􀁘􀁖ef􀁘l i􀁑 􀁑a􀁑􀁒-de􀁙ice a􀁓􀁓lica􀁗i􀁒􀁑􀁖 [6-8] a􀁑d 3-D 􀁑a􀁑􀁒􀁐a􀁗e􀁕ial􀁖 i􀁑cl􀁘de 􀁓􀁒􀁚de􀁕􀁖, 􀁐􀁘l􀁗ila􀁜e􀁕􀁖 e􀁗c. Se􀁐ic􀁒􀁑d􀁘c􀁗i􀁑g 􀁑a􀁑􀁒􀁐a􀁗e􀁕ial􀁖 a􀁕e 􀁒􀁑e 􀁒f 􀁗he 􀁙al􀁘ed cla􀁖􀁖 􀁒f 􀁑a􀁑􀁒􀁐a􀁗e􀁕ial􀁖. A 􀁖e􀁐ic􀁒􀁑d􀁘c􀁗􀁒􀁕 (SC) i􀁖 a 􀁐a􀁗e􀁕ial 􀁚i􀁗h elec􀁗􀁕icall􀁜 ac􀁗i􀁙e i􀁑 􀁐ag􀁑i􀁗􀁘de be􀁗􀁚ee􀁑 i􀁑􀁖􀁘la􀁗􀁒􀁕 a􀁑d c􀁒􀁑d􀁘c􀁗􀁒􀁕􀁖. The􀁜 ha􀁙e g􀁒􀁙e􀁕􀁑ed a 􀁐aj􀁒􀁕 􀁕􀁒le i􀁑 􀁑a􀁑􀁒􀁖cie􀁑ce a􀁑d 􀁑a􀁑􀁒-􀁗ech􀁑􀁒l􀁒g􀁜 􀁓􀁕􀁒g􀁕e􀁖􀁖i􀁑g 􀁕e􀁖ea􀁕ch, 􀁕e􀁖􀁘l􀁗i􀁑g 􀁑􀁒􀁙el cla􀁖􀁖e􀁖 􀁒f SC􀁖. U􀁖􀁘all􀁜, c􀁘􀁕􀁕e􀁑􀁗 c􀁒􀁑d􀁘c􀁗i􀁒􀁑 i􀁑 c􀁒􀁑d􀁘c􀁗􀁒􀁕􀁖 i􀁖 c􀁒􀁑􀁖ide􀁕ed beca􀁘􀁖e 􀁒f elec􀁗􀁕􀁒􀁑􀁖 􀁒􀁑l􀁜 b􀁘􀁗 i􀁑 􀁖e􀁐ic􀁒􀁑d􀁘c􀁗􀁒􀁕􀁖, i􀁗 i􀁖 affec􀁗ed b􀁜 b􀁒􀁗h elec􀁗􀁕􀁒􀁑 a􀁖 􀁚ell a􀁖 h􀁒le ac􀁗i􀁙i􀁗ie􀁖. A􀁑 􀁘􀁑c􀁒􀁑􀁗a􀁐i􀁑a􀁗ed 􀁖e􀁐ic􀁒􀁑d􀁘c􀁗􀁒􀁕 i􀁖 􀁑a􀁐ed a􀁖 i􀁑􀁗􀁕i􀁑􀁖ic 􀁖e􀁐ic􀁒􀁑d􀁘c􀁗􀁒􀁕. The elec􀁗􀁕ical 􀁓􀁕􀁒􀁓e􀁕􀁗ie􀁖 􀁒f SC ca􀁑 be al􀁗e􀁕ed i􀁑 a c􀁒􀁑􀁗􀁕􀁒lled 􀁚a􀁜 b􀁜 􀁗he addi􀁗i􀁒􀁑 􀁒f 􀁙e􀁕􀁜 􀁐i􀁑􀁒􀁕 a􀁐􀁒􀁘􀁑􀁗􀁖 􀁒f diffe􀁕e􀁑􀁗 􀁐a􀁗e􀁕ial􀁖 􀁑a􀁐ed d􀁒􀁓a􀁑􀁗􀁖. Thi􀁖 field i􀁖 􀁓􀁕edic􀁗able 􀁗􀁒 􀁒􀁓e􀁑 􀁑e􀁚 􀁒􀁓􀁓􀁒􀁕􀁗􀁘􀁑i􀁗ie􀁖 f􀁒􀁕 􀁖cie􀁑ce a􀁖 􀁚ell a􀁖 􀁗ech􀁑􀁒l􀁒g􀁜 [9, 10]. S􀁜􀁑􀁗he􀁖i􀁖 a􀁑d 􀁗he a􀁓􀁓lica􀁗i􀁒􀁑 􀁓a􀁕􀁗 􀁒f 􀁗he 􀁐e􀁗al 􀁒􀁛ide 􀁑a􀁑􀁒􀁖􀁗􀁕􀁘c􀁗􀁘􀁕e􀁖 i􀁖 􀁒􀁑e 􀁒f 􀁗he 􀁖􀁓ecial cla􀁖􀁖, 􀁚hich bel􀁒􀁑g 􀁗􀁒 􀁑a􀁑􀁒-􀁗ech􀁑􀁒l􀁒g􀁜. Me􀁗al 􀁒􀁛ide􀁖 ha􀁙e bee􀁑 􀁓􀁕􀁒􀁙ed 􀁗􀁒 be 􀁓􀁒􀁗e􀁑􀁗ial ca􀁑dida􀁗e f􀁒􀁕 a 􀁙a􀁕ie􀁗􀁜 􀁒f 􀁕eal- 􀁚􀁒􀁕ld a􀁓􀁓lica􀁗i􀁒􀁑􀁖. The e􀁛celle􀁑􀁗 􀁓h􀁜􀁖ical, che􀁐ical a􀁑d 􀁗he􀁕􀁐al 􀁖􀁗abili􀁗􀁜 􀁒f 􀁗he􀁖e 􀁐a􀁗e􀁕ial􀁖 all􀁒􀁚 􀁗he􀁐 􀁗􀁒 be e􀁛􀁗e􀁑􀁖i􀁙el􀁜 􀁘􀁖ed i􀁑 􀁙a􀁕i􀁒􀁘􀁖 f􀁘􀁑da􀁐e􀁑􀁗al a􀁑d 􀁗ech􀁑ical a􀁓􀁓lica􀁗i􀁒􀁑􀁖 [11-15].