FABRICATION AND CHARACTERIZATION OF PZT THIN FILM AND MODELING OF SENSORS THROUGH IT

Abstract

This thesis contains the work on preparation of PZT thin film and modeling of sensor through it .PZT comes under the category smart materials, it shows the properties of ferroelectricity, piezoelectricity and pyroelectricity and it is widely used in sensors and actuators . In this work we first made PZT in bulk form and perform its various structural and electrical characterization. After making pellet in highly pure form, thin film are prepared using PLD from this target. Various properties of PZT thin film are then observed , discussed and compared with the polycrystalline bulk material. silicon is used as substrate for making thin film ,so the properties observed can be directly utilized in integrated circuit technology. Finally based on observed data some useful electronics circuits are modeled